Products Controllers

temperature controller

Temperature

Control ranges from 80 K to 1000 °C.

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pressure controller

Pressure

Vacuum pressure control from 0.001 to 1000 Torr with precise stabilization.

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Guage and controller

Gauge

Compact MEMS multi-gas vacuum gauge covering high vacuum to atmospheric pressure.

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gas controller

MFC

Precision MFC system with 0.01 % to 100 % control range and 100:1 turndown ratio supporting up to 130 gases.

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humidity controller

Humidity

Precision humidity system with 4 % to 95 % RH range and 0.1 % RH accuracy, compatible with N2, air, and Ar.

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chiller controller

Micro Chiller

Chiller for Micro Probe Systems

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