Precision Vacuum Pressure Control System
The Precision Vacuum Pressure control
system can control partial pressure with
the desire gas by adjusting the flow.
The
software can automatically acquest and
maintain it as a recipe.
| General Specification | ||
|---|---|---|
| Manufacturer | Nextron Corporation | |
| Product Name | Precision Vacuum Pressure Control System | |
| Model Number | PCS-WP | |
| Dimensions | W | 260 mm |
| D | 360 mm | |
| H | 280 mm | |
| Weight | 15.8 kg | |
| Input Power | 100 - 240 VAC, 50/60 Hz | |
| External Port | Communication Interface | USB 2.0 Type B |
| Vacuum Line Pump Side | NW25 KF | |
| Gas Flow Inlet / Outlet | Swagelok tube fitting ¼“ | |
| Pneumatic valve | Swagelok tube fitting ¼“ | |
| Vacuum Line Chamber Side | NW16 KF | |
| Gauge A/B | RJ50 | |
| Number of MFC Unit | 2 ea | |
| Technical Information | |||
|---|---|---|---|
| Gauge | Type | Micro Multi-Gas Vacuum Gauge | |
| Range of guage A | 5 × 10-4 to 1000 mbar | ||
| Operating Temperature | -20 – 120 °C | ||
| Signal Interface | Subminiature C 9-Pin | ||
| Vacuum Interface | ISO NW16 KF Flange | ||
| ADC resolution | 24 bit | ||
| Automatic Pressure Compensation | RTD PT100 temperature sensor based | ||
| Pressure Control Range | 0.002 – 1000 mbar | ||
| Resolution | 0.002 – 1 mbar: 0.0005 mbar | ||
| 1 – 1000 mbar: 0.25 mbar | |||
| Gas Flow Rate | MFC Low (for range 0.001 – 1 torr) | 0.05 – 5 SCCM | |
| MFC High (for range 1 – 1000 torr) | 2 – 200 SCCM | ||
| Recommended Pressure for Gas Inlet | 2 - 5 barg | ||
| Recommended Pressure for Pneumatic Valves | 4 - 5 barg | ||
| Typical Warm-Up Time | > 30 min | ||
| Stabilization Time in Target Pressure | < 10 min | ||
| Available Gas | 130+ user-selectable gases supported by the internal MFC. The gauge is factory calibrated for N₂, with optional calibration data storage for up to 40 gases. | ||
| Pressure Control Type | Double PIDr | ||
| Communication type | USB Serial | ||
| Required power | 265 VA MAX | ||
The specifications of this product are subject to change without prior notice.
Dimension
(Unit: mm)
|
|
|---|---|
| Top | 3D |
|
|
| Front | Right |
Diagram
Technical Data
Figure. Pressure control performance of PCS-WP from 0.005 Torr to 1000 Torr.
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