Micro Multi-Gas Vacuum Gauge
Nextron’s Micro Multi-Gas Vacuum Gauge is a compact MEMS-based gauge designed for precise and stable pressure measurement across a wide vacuum range. It measures from 5 × 10-4 to 1000 mbar using a single module, covering high vacuum to near-atmospheric pressure. Its compact design, multi-gas capability, and built-in temperature compensation make it ideal for research laboratories, semiconductor processes, and vacuum system integration. ISO NW16 KF flange compatibility for easy integration. Multi-gas calibration capability for up to 40 calibration data for various gases. Automatic pressure compensation based on temperature variation.
| Sensor Specifications | |
|---|---|
| Temperature Sensor Type | RTD PT100 |
| Measurement Range | 5 × 10-4 to 1000 mbar |
| Operating Temperature | -20 – 120 °C |
| Signal Interface | Subminiature C 9-Pin |
| Vacuum Interface | ISO NW16 KF Flange |
| Weight | 30 g (including ISO NW16 KF flange) |
The specifications of this product are subject to change without prior notice.
| Controller Specifications | |
|---|---|
| Panel Display | 1.9” color LCD |
| Sensor Input Connector | RJ50 |
| ADC resolution | 24 bit |
| Number of Sensor Ports | 2 |
| Communication Interface | USB 2.0 Type-C |
| Operating Temperature | -10 to 50 °C |
| Power Input | 9 – 18 VDC |
| Power Consumption | 5 W |
The specifications of this product are subject to change without prior notice.
Dimension
(Unit: mm)
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|---|---|
| Front | 3D |
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| Back | Right |
Mounting Configuration
Figure. Cover mounting configuration.
Figure. In-line mounting configuration.
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