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Probe Type

Motorized(Piezo) probeModule

Manual(Tracking) ModuleDuo(Piezo+Manual)

Motorized & Manual

For the contact pad smaller than 400μm x 400μm, Motorized (Piezo) type probe is recommended.

Frequency

DC (0 ~ 300MHz) RF ( ~ 40GHz)

Channel

4CH 6CH 8CH LLCC OTHER

Temperature

80 K ~ RT -40 °C ~ 200 °C RT ~ 450 °C RT ~ 750 °C RT ~ 1000 °C

Controller

Temperature Humidity MFC (Gas Flow) Vacuum Pressure

Software

*The integrated program is provided.

Special

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