RF Micro Probe System with GSG Probe

RF micro probe system with GSG probes supporting up to 60 GHz measurements and XYZ micropositioning.

Temperature Range	80K to RT (PZRFMPS-LN/PZRFMPS-LNH)
	-40 to 170 °C (PZRFMPS-PTH)
	-40 to 200 °C (PZRFMPS-PT)
Maximum Cooling / Heating Rate	60 °C/min
Temperature Accuracy	±0.1 °C
Temperature Resolution	0.1 °C
Sample Stage Dimension	20 × 20 mm (PZRFMPS-LN/PZRFMPS-LNH)
	16 × 16 mm (PZRFMPS-PTH)
	19 × 19 mm (PZRFMPS-PT)
Stage Material	Rhodium coated copper
Window *	Ø 43 mm (Fused Silica)
Number of Probes in Standard Chamber **	2
Probe Module	Piezo Driven XYZ module
Piezo Module Stroke (X ,Y, Z Axis)	8 × 8 × 3 mm
Piezo Module Holding Force	150 to 200 gf
Vacuum Test	1E-2 mbar at RT (With Rotary Pump)
	1E-4 mbar at RT (With Turbo Pump)
Vacuum & Vent Line Fitting	Basic	1/4 in. tube fitting (Swagelok®-type)
	Optional	NW16
Leakage Current	< 100 pA (Coaxial)
	< 100 fA (Triaxial)
Maximum DC Voltage	300 V
Maximum Current	1000 mA
Maximum Frequency	300 MHz (< 3 dB)

* For comprehensive information on windows, please refer to the window selection guide for optical covers.
** Customization is available for the number of probes.

GSG Probe Tip 1),2)
Standard Pitch Range	25 to 2540 μm
Minimum Pad Size	80 × 80 μm
Maximum Frequency	60 GHz

¹⁾ Dual Type GSG Probe is also available
²⁾ The number of probes in the chamber can be configured with 1, 2, or custom configurations.

Dimension

Top	3D
Front	Right

GSG Probe Tip Close up