RF Micro Probe System with GSG Probe
RF micro probe system with GSG probes supporting up to 40 GHz measurements and XYZ micropositioning.
| GSG Probe Tip 1),2) | ||
|---|---|---|
| Standard Pitch Range | 50 – 1250 μm | |
| Minimum Pad Size | 80 × 80 μm | |
| Maximum Frequency | 40 GHz | |
| SMA Vacuum Feedthrough | ||
| Impedance | 50 Ω | |
| Maximum Frequency | 40 GHz | |
| Available Temperature | - 65 – 125 °C | |
| Minimum Bend Radius | < 5 × 10-10 mbar · l/s | |
| Coaxial cable inside the chamber | ||
| Impedance | 50 Ω | |
| Maximum Frequency | Cable | 67 GHz |
| SMA Port | 40 GHz | |
| Available Temperature | - 40 – 120 °C | |
| Minimum Bend Radius | 1.5 mm | |
| XYZ - Micropositioner | ||
| Maximum Travel | 9.5 mm | |
| Resolution | 1 μm | |
| Sensitivity | 1 μm | |
1) Dual Type GSG Probe is also available
2) The number of probes in the chamber can be configured with 1, 2, or custom configurations.
Dimension
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|---|---|
| Top | 3D |
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| Front | Right |
GSG Probe Tip Close up
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