High-Voltage Piezo Module Micro Probe System

The High-voltage Micro Probe System (HVMPS) series is designed specifically for high-voltage electrical and optical characterization. PEEK and ceramic insulation prevents electrical shorts and breakdown, and SHV connectors ensure safe electrical performance without high-voltage interference. The system integrates the control of temperature, humidity, gas flow and vacuum pressure within a compact chamber to analyze electrical and optical behavior.

Model	HVMPS-PT	HVMPS-CHL	HVMPS-CHH	HVMPS-CHU	HVMPS-LN
Sample Stage Material	Copperplated special alloy	AlN			Copper
Sample Stage Size	19 × 19 mm	Ø 12.7 mm			Ø 18 mm
Temperature Range	-40 to 200 °C	RT to 450 °C	RT to 750 °C	RT to 1000 °C	80 K to RT
Temp. Accuracy	±0.1 °C	±1 °C			±0.1 °C
Temp. Resolution	0.1 °C	1 °C			0.1 °C
Max. Heating/Cooling Rate	30 °C/min
Environmental control	Vacuum tight < 1E-2 mbar (at RT with Rotary pump)
	Humidity control option 4 - 95 %RH
	Vacuum partial pressure control option 0.001 - 1300 mbar
	MFC Gas control option
Max. Voltage	1kV DC
Max. Current	1000 mA
Insulation Structure	PEEK enclosure (for chamber) & Ceramic Tube (for probe and cable)
High Voltage Terminal	SHV-5 Coaxial connector
Leakage Current	< 100 pA
Frequency Range	DC to 300 MHz (< 3 dB)
High Voltage Terminal	SHV-5 Coaxial connector
Number of Probe Modules	4 EA
Probe Tip Diameter	250 μm
Chamber External Dimensions	176 mm (W) × 120 mm (D) × 57.4 mm (H)
Chamber Inner Volume	< 460 cc
Weight	~ 2.2 kg

*It could be customized: Sample stage size, number of probe modules, probe tip diameter, Max. voltage & current, etc.